TERPS (Trench Etched Resonant Pressure Sensor) offers an order of magnitude greater performance over current technologies to provide the highest accuracy and stability sensor available.
It also significantly extends the pressure range capability conventionally associated with resonating pressure technology (RPT) sensors and enables robust packaging, suitable for harsh environments. The RPS/DPS 8000 resonant silicon pressure sensor is the first pressure sensor to incorporate GE’s TERPS technology platform.